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微區螢光光譜元素分析儀|iXRF|μ-XRF (spot size: 5um)

iXRF μ- XRF technique

.5 微米空間解析度:5 µm spot size
.高S/N值
.高準確度與精確度:降低 XRF peak 重疊問題
.待測物型態多樣化:無導電樣品、固態、液態、粉末皆可分析
.高乘載、大面積樣品台:適用於封裝後積體電路板分析與鍍層厚度測試 (承載 10 kg,400x300 mm mapping)

Why you need μ- XRF?

空間高解析度:spot size 5μm

一般μ-XRF儀器設計 (resolution: 25μm)

iXRF μ-XRF (resolution: 5μm)

如右圖 iXRF μ-XRF, 5μm resolution 所示,iXRF μ-XRF 將 X-ray 光源透過 Poly-capillary 聚焦光學配件,將光束(spot size)縮小至 5 μm,並以垂直式照射於樣品表面,使得我們可以用解析度為 5 μm 來分析待測物表面資訊。

(一般 μ-XRF,由於激發光束須經由一個角度才照射到表面,造成 spot 為橢圓型,因此解析度也限制在 10~25μm)

 

實際案例:從下圖實際測試中可得到 iXRF 5μm resolution,得到的樣品畫質較佳

一般μ-XRF( resolution: 20μm)

iXRF μ-XRF (resolution: 5μm)

 

高S/N

以下為 400 ppm 濃度比較圖,可得知 μ-XRF 相較於 SEM-EDS 可得到較佳的 S/N 值,Detection limit 接近於 low ppm。

SEM-EDS

iXRF μ-XRF

 

高準確度與精確度:解決peak overlap issue

如下圖所示,μ-XRF 高解析度,清楚分出 S、Mo、Pb 譜線

SEM-EDS

iXRF μ-XRF

高乘載、大面積樣品台:可乘載 10kg 樣品,進行 400 x 300 mm mapping

 

產品詳細規格

 

ATLAS M

ATLAS XL

Sample Types

Solids, Liquids, Particles, Powders

Sample Chamber Size

508x457x254mm

950x650x365mm

Measurement Media

Air, Vacuum, He

Excitation Source 

Primary: 50W / 50kV / 1mA
Secondary: 10W / 50kV / 0.2mA

Excitation Parameters 

Aperture or Polycapillary Collimation
Target Materials: Rh (others available)
Tube: 50kV, 50W, 1mA (optional 2nd tube)
Spot Size: ≤5-1000μ
Filters: Up to 8

Detector

SDD (Si-Pin upon request)
Resolution: 130-145eV
Active Area: 30-150mm2 (Up to 600mm2)

Stage

Motorized X,Y,Z (available)
Up to 220x220x120mm ranges available
10kg+ load capacity

Motorized X,Y,Z (available)
Up to 600x300x210mm ranges available
10kg+ load capacity

Sample Travel

Total: 220x220x120mm
Mapping: 220x200mm
Map Scan Speed: 1-3ms/pixel
Sample Speed: up to 300mm/second

Total: 600x300x210mm
Mapping: 400x300mm
Map Scan Speed: 1-3ms/pixel
Sample Speed: up to 400mm/second

Sample View

Three Sample Positioning and Analysis Cameras

Element Range

Na-U

Quality and Safety

CE certified RoHS, Radiation < 1 μSv/h

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