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微區螢光光譜元素分析儀|iXRF|μ-XRF (spot size: 5um)

iXRF μ- XRF technique

.空間高解析度:spot size 5um
.高S/N值
.高準確度與精確度:降低XRF peak重疊問題
.待測物型態多樣化:無導電樣品、固態、液態、粉末皆可分析
.高乘載、大面積樣品台:可乘載10kg樣品,進行400 x 300mm mapping

Why you need μ- XRF?

  • 空間高解析度:spot size 5μm

一般μ-XRF儀器設計 (resolution: 25μm)

iXRF μ-XRF (resolution: 5μm)

如右圖iXRF μ-XRF, 5μm resolution所示,iXRF μ-XRF將X-ray光源透過Poly-capillary聚焦光學配件,將光束(spot size)縮小至5μm,並以垂直式照射於樣品表面,使得我們可以用解析度為5μm來分析待測物表面資訊。

(一般μ-XRF,由於激發光束須經由一個角度才照射到表面,造成spot為橢圓型,因此解析度也限制在10~25μm)

 

實際案例:從下圖實際測試中可得到 iXRF 5μm resolution,得到的樣品畫質較佳

一般μ-XRF( resolution: 20μm)

iXRF μ-XRF (resolution: 5μm)

 
  • 高S/N

以下為400ppm濃度比較圖,可得知μ-XRF相較於SEM-EDS可得到較佳的S/N值,Detection limit接近於low ppm。

SEM-EDS

iXRF μ-XRF

 

  • 高準確度與精確度:解決peak overlap issue

如下圖所示,μ-XRF高解析度,清楚分出S、Mo、Pb譜線

SEM-EDS

iXRF μ-XRF

  • 高乘載、大面積樣品台:可乘載10kg樣品,進行400 x 300mm mapping

 

產品詳細規格

 

ATLAS M

ATLAS XL

Sample Types

Solids, Liquids, Particles, Powders

Sample Chamber Size

508x457x254mm

950x650x365mm

Measurement Media

Air, Vacuum, He

Excitation Source 

Primary: 50W / 50kV / 1mA

Secondary: 10W / 50kV / 0.2mA

Excitation Parameters 

Aperture or Polycapillary Collimation

Target Materials: Rh (others available)

Tube: 50kV, 50W, 1mA (optional 2nd tube)

Spot Size: ≤5-1000μ

Filters: Up to 8

Detector

SDD (Si-Pin upon request)

Resolution: 130-145eV

Active Area: 30-150mm2 (Up to 600mm2)

Stage

Motorized X,Y,Z (available)

Up to 220x220x120mm ranges available

10kg+ load capacity

Motorized X,Y,Z (available)

Up to 600x300x210mm ranges available

10kg+ load capacity

Sample Travel

Total: 220x220x120mm

Mapping: 220x200mm

Map Scan Speed: 1-3ms/pixel

Sample Speed: up to 300mm/second

Total: 600x300x210mm

Mapping: 400x300mm

Map Scan Speed: 1-3ms/pixel

Sample Speed: up to 400mm/second

Sample View

Three Sample Positioning and Analysis Cameras

Element Range

Na-U

Quality and Safety

CE certified RoHS, Radiation < 1 μSv/h

立即與利泓聯繫,請填寫以下資訊,我們將請專員與您聯繫。