微區螢光光譜元素分析儀|iXRF|μ-XRF (spot size: 5um)
iXRF μ- XRF technique
．空間高解析度：spot size 5um
．高S/N值
．高準確度與精確度：降低XRF peak重疊問題
．待測物型態多樣化：無導電樣品、固態、液態、粉末皆可分析
．高乘載、大面積樣品台：可乘載10kg樣品，進行400 x 300mm mapping
英文產品型錄
iXRF μ- XRF technique
．空間高解析度：spot size 5um
．高S/N值
．高準確度與精確度：降低XRF peak重疊問題
．待測物型態多樣化：無導電樣品、固態、液態、粉末皆可分析
．高乘載、大面積樣品台：可乘載10kg樣品，進行400 x 300mm mapping
英文產品型錄Why you need μ- XRF?
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一般μ-XRF儀器設計 (resolution: 25μm) |
iXRF μ-XRF (resolution: 5μm) |
如右圖iXRF μ-XRF, 5μm resolution所示，iXRF μ-XRF將X-ray光源透過Poly-capillary聚焦光學配件，將光束(spot size)縮小至5μm，並以垂直式照射於樣品表面，使得我們可以用解析度為5μm來分析待測物表面資訊。
(一般μ-XRF，由於激發光束須經由一個角度才照射到表面，造成spot為橢圓型，因此解析度也限制在10~25μm)
實際案例：從下圖實際測試中可得到 iXRF 5μm resolution，得到的樣品畫質較佳
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一般μ-XRF( resolution: 20μm) |
iXRF μ-XRF (resolution: 5μm) |
以下為400ppm濃度比較圖，可得知μ-XRF相較於SEM-EDS可得到較佳的S/N值，Detection limit接近於low ppm。
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SEM-EDS |
iXRF μ-XRF |
如下圖所示，μ-XRF高解析度，清楚分出S、Mo、Pb譜線
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SEM-EDS |
iXRF μ-XRF |
產品詳細規格
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ATLAS M |
ATLAS XL |
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Sample Types |
Solids, Liquids, Particles, Powders |
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Sample Chamber Size |
508x457x254mm |
950x650x365mm |
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Measurement Media |
Air, Vacuum, He |
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Excitation Source |
Primary: 50W / 50kV / 1mA Secondary: 10W / 50kV / 0.2mA |
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Excitation Parameters |
Aperture or Polycapillary Collimation Target Materials: Rh (others available) Tube: 50kV, 50W, 1mA (optional 2nd tube) Spot Size: ≤5-1000μ Filters: Up to 8 |
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Detector |
SDD (Si-Pin upon request) Resolution: 130-145eV Active Area: 30-150mm2 (Up to 600mm2) |
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Stage |
Motorized X,Y,Z (available) Up to 220x220x120mm ranges available 10kg+ load capacity |
Motorized X,Y,Z (available) Up to 600x300x210mm ranges available 10kg+ load capacity |
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Sample Travel |
Total: 220x220x120mm Mapping: 220x200mm Map Scan Speed: 1-3ms/pixel Sample Speed: up to 300mm/second |
Total: 600x300x210mm Mapping: 400x300mm Map Scan Speed: 1-3ms/pixel Sample Speed: up to 400mm/second |
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Sample View |
Three Sample Positioning and Analysis Cameras |
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Element Range |
Na-U |
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Quality and Safety |
CE certified RoHS, Radiation < 1 μSv/h |
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